抄録
This paper describes a novel active head slider equipped with micro-actuator using PZT thin films for flying height control. The active head slider is a breakthrough technology for achieving ultra-low spacing of less than 10nm. The position of a read/write magnetic head is gone above and below because an unimorph cantilever build in the slider bends by PZT thin film, and flying height is controlled. The multi-step silicone etching process by ICP-RIE or RIE is important to fabricate active head sliders. Therefore, the fabrication process of a silicone slider structure was completed by optimizing etching conditions.
