抄録
We propose the micro power generator utilizing the flow-induced vibration which converts kinetic energy into electricity. It is one of the factor technologies of Ubiquitous equipment and now its demand is increasing rapidly. We adopt the electrostatic induction power generator which has an advantage in micro scale. In preliminary experiment, we obtained 0.91μW power generation with self-excited oscillation of 0.25mm amplitude at 1100Hz.
