IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: 1103
会議情報
1103 圧電素子を用いた微動アクチュエータにおける制振構造の効果(要旨講演,マイクロメカトロニクス)
斉藤 耕治渋谷 嗣菅谷 公志森 英季長縄 明大大内 一弘
著者情報
会議録・要旨集 フリー

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抄録
A dumping system for micro piezo actuator was studied. The actuator is designed for nano precise positioning with high speed motion control to apply the trucking system that follows an under 10nm width truck on a disk rotating over 6000rpm. So the required servo band of the actuator is closing to 10kHz even though the actuator has the first resonance near 5kHz. A dumping material is applied to reduce the magnitude of the resonance as a servo band goes beyond the resonance frequency with control system design. The dumping material consists of four layers that are adhesion tape, PET film, adhesion tape and a SUS plate. The first adhesion tape is pasted on the actuator frame. The viscoelasticity of the adhesion films dumps the vibration of the actuator by the differential mode between the frame surface and the SUS plate in operation. The dumping effect gets larger as the SUS plate getting thicker because the heavier SUS plate, greater inertia, makes larger differential mode. On the other hand, the heavier SUS plate makes the resonance frequency lower. In this paper, an idea of design to reduce the magnitude of resonance while maintaining the resonance frequency that converges the mass on viscoelasticity layers at where larger stress seemed to be occurred. The larger stress points were inspected by using FEM analysis. Effects of the method was evaluated experimentally. The result shows good. Both greater resonance mode reduction and higher resonance frequency are simultaneously obtained.
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© 2005 一般社団法人 日本機械学会
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