抄録
Recently, the increase of track density in optical disk drives is very remarkable in order to achieve large capacity storage devices. It is important to design and develop the high speed head positioning control mechanisms with high accuracy. Therefore, this paper proposes the MEMS mirror piezoelectric actuator mechanism using PZT thin film as the control mechanism. This MEMS mirror is fabricated by using silicon-based micro machining technologies. In this paper, the deep etching of silicon as well as the sputtering was studied and the fabrication process of the MEMS-based head tracking micro-actuator mechanisms was developed.
