抄録
This paper proposes a novel micro actuator head mechanism for ultra-high density hard disk devices. In order to improve the recording density of hard disk drives, tracking control technologies that position heads on the track with high speed and high reliability is very important. Furthermore, head-disk spacing control technologies are also important to achieve contact recording. In this study, the micro actuator mechanism, that can operate independently in both tracking directions of in-plate and out-of-plate motions by using electrostatic micro actuators and the PZT thin films, were studied. This paper reports silicon micro machining process technologies. In other words, the fabrication process of a prototype actuator was discussed and developed by optimizing etching conditions, because the multi-step silicone etching process by ICP-RIE or RIE is important to fabricate the proposed micro actuator.
