抄録
This paper describes a micro-drill processing system of precise mechanical parts, using an electromagnetically levitated stage. Electromagnetically levitated stage is free from friction, so that convenient for measurement and control of small forces which occur in between a tool and a work-piece. In this paper, the effectiveness of this system is shown by an experiment of detecting the contact of micro-drill and work-piece and making pierced holes of 0.1mm diameter in a steel plate of 1mm thickness.
