抄録
Established ellipsometric microscopes have low resolution because diagonal observation set a limit to focused area due to focal depth of objective lens. In this paper, we represent a new illumination method. We arrange an objective lens pointing vertically downward to sample, and condense illumination light into back focal plane with shifted light from lens axis to peripheral spot. Therefore, we give off diagonal light from objective lens. Adopting this method, we can observe reflected light from sample in the same way of usual optical microscope. As a result, we can visualize fluid dynamics of nano-thick films with a high-resolution.
