抄録
This paper reports a dynamic control device for surface acoustic wave (SAW) modulation by using grating structures and periodic convex structures. A grating structure between transmitting and receiving IDTs and a periodic convex structure for putting into the grating structure was fabricated to control dynamically a surface acoustic wave. We used LiNbO_3 for piezoelectric substrate, and Silicon for periodic convex structure. IDTs were designed as 99MHz and 66MHz. It is shown that resonant frequency of IDTs were changed to a lower value by effect of the grating structure and that noise level was decreased by putting the convex structure on the grating structure.
