抄録
MEMS tweezers to trap and manipulate bio molecules was fabricated. The gap size was controlled by KOH wet etching and Focused Ion beam process at the range from fifteen nanometers to twenty five micrometers to trap several different size of DNA molecules. We also fabricated the modified design of tweezers to successful trap of DNA, because thermal circulation drags away molecules from tips of tweezers, which occurred by high frequency electric field. These tweezers were tested to trap DNA molecules to verify the function.
