IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: 2114
会議情報
2114 ファンデルポール型自励発振マイクロカンチレバーを用いたAFMの特性(要旨講演,一般セッション:マイクロナノメカトロニクス)
染谷 貴司芦田 極藪野 浩司黒田 雅治
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会議録・要旨集 フリー

詳細
抄録
Self-excitation thechnique is known as an effective excitation method for a cantilever probe of the atomic force microscope to measure the surface of a biological sample in a liquid environment. In this research, we deal with a van der Pol type cantilever probe, which is previously proposed to realize the non-contact mode, and experimentally examine the relationships between the response frequency and amplitude and the gap of the cantilever probe and the surface. From the result, the performance of the self-excited cantilever probe from viewpoint of the contact between the cantilever and the surface.
著者関連情報
© 2008 一般社団法人 日本機械学会
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