IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: B-3
会議情報
B-3 ホットスイッチングによるMEMSスイッチ表面におけるナノスケール形状変化の実時間観察(口頭発表:マイクロナノメカトロニクス)
石田 忠藤田 博之
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会議録・要旨集 フリー

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The deformation on the surface of the gold MEMS opposing tips was observed with a transmission electron microscope. A gold nanocontact was formed between the tips, resulting in 92 μA under 1 V in bias voltage. And then, the nanocontact was separated with the retraction using MEMS actuators. After the breakage of the gold nanocontact, the tip was vibrated and performed the cyclic contact/separation experiment. The shape of the tip were initially sharpened from 1.3 nm up to 0.6 nm in radius curvature at 17 millicon times and finally flattened to 4.1 nm at 17.7 millicon times.
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