抄録
Rolling friction is known to behave as a nonlinear elastic element in the micro-displacement region. To improve the accuracy of positioning equipment, we propose a control method that takes characteristic variation of the mechanical system into account. The proposed method involves the use of a switchable controller and a phase-delay (LAG) filter that stabilizes the feedback system. By using model-based simulation, the controller is optimized to satisfy machine specifications. The simulation results show that the proposed control system has sufficient robustness in the nonlinear characteristics. Moreover, we applied the proposed control method to our motion control system and confirmed its effectiveness using actual stage equipment.
