抄録
The advantage of the magnetic actuator using the magnetic suck power is to move by noncontact, and to move by a low voltage. Therefore, it is used for MEMS with an electrostatic actuator and the piezo actuator. The actuator adopted a round diaphragm. And, the magnetic substance was formed as a thin film by using the vacuum evaporation method. The magnetic suck power is generated by adding the voltage to an electromagnetic coil and giving the magnetic field, and the diaphragm moves. Oppositely, it returns to the origin by removing an additional voltage. The voltage added to an electromagnetic coil was assumed to be 20v, 40v, 60v, and 80v. And, the movement at that time was confirmed. Movement when the diameter of the diaphragm was assumed to be 2mm, 3mm, 4mm, 5mm, and 6mm was similarly confirmed.
