E-2-1 ポリイミドフィルムを用いた静電-弾性協働マイクロアクチュエータの試作

抄録

The actuators using electrostatic energy have been reported because these actuators have some advantages. It can be driven by a little energy because of using electrostatic energy. These actuators also have simple structure and it is easy to miniaturize them. However, these actuators generally can generate low power. The reason is that the energy conversion method from electrostatic energy to mechanical energy is not appropriate. We proposed the novel drive principle of the microactuator, which makes electrostatic energy/force collaborate with the elastic energy/force. In this paper, this microactuator powered by collaboration of electrostatic and elastic energies/forces was fabricated with solving some problems on the fabrication process. The operation of the microactuator was observed by applying voltage of 150V.