抄録
Dual-axis friction force microscopy probe can provide accurate measurement of lateral and normal forces without mechanical interferences of lateral and normal deformation of the probe. However, lateral movement of the probe causes essential problems such as image distortion and degradation of lateral resolution, which come from position difference between the tip and probe support. Here, we tried to solve these problems by using a dual-axis probe with an electrostatic actuator and controlling the tip position by the electrostatic force.
