IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: H-1-2
会議情報
H-1-2 エリプソメトリー顕微鏡を用いたナノ厚さ潤滑膜の修復過程のリアルタイム可視化
渡辺 亮太福澤 健二伊藤 伸太郎張 賀東
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会議録・要旨集 フリー

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抄録
Recovery or replenishment of lubricant holes caused by sliding is important for thin-film lubrication. However, due to the difficulty of measurement, the recovery process of molecularly thin lubricant films has not been fully clarified yet. In this report, we tried to observe the recovery process of monolayer thick films by using two-stage imaging ellipsometric microscope. Using the developed microscope, the recovery process of the monolayer films with different bonding ratio was investigated.
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