光電子アシスト CVD 法によって成膜された複合潤滑膜の HDI トライボロジー特性

抄録

To increase HDD capacity, the thickness of lubricant film on the magnetic disks need to be reduced. The lubricant film deposited by using the photoelectron assisted chemical vapor deposition (PACVD) with low molecular weight perfluoropolyether (PFPE) lubricant showed high bond ratio, low surface energy and high coverage. In this study, we compared the tribological performances on head-disk interface of PFPE lubricant films deposited by PACVD with DC bias voltage and RF pulse bias voltage. As the result, the lubricant film deposited by DC and RF pulse voltage showed very high touch down power (TDP). In addition, the lubricant film deposited by RF pulse voltage showed low slider wear.