圧電アクチュエータを利用した駆動システムにおける位置制御系の設計

抄録

This paper introduces the case study of control design approach for position control system using piezoelectric actuators. To achieve the high precision control using piezoelectric actuators, the disturbances such as nonlinearities due to hysteresis and creep phenomena should be compensated. In addition, resonant vibration modes in the mechanism lead to residual vibrations in the positioning or may even destabilize the system. For the hysteresis compensation, Plandtl-Ishlinskii model-based inverse compensation is introduced to linearize the plant characteristic, where the parameters are identified using the adaptive algorithm in real time. As one of the vibration suppression approaches, a self-sensing technique using simple external circuit is introduced to detect and suppress the vibration modes.