周波数領域データに基づく薄膜の音響物性値の可視化

抄録

This paper reports on an acoustic resonant imaging technique that visualizes the acoustic properties of a thin film formed on the substrate. A photoresist film was formed on the top surface of the Si substrate, and the echoes reflected from the bottom surface of the substrate were recorded to create the acoustic image. By analyzing the frequency domain data of the echoes, the distribution of acoustic impedance was successfully visualized.