Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 06, 2023 - March 07, 2023
In this study, we fabricated flexible piezoelectric energy harvesters (PEHs) from lead-free (K,Na)NbO3(KNN) thin films on stainless steel foils. The KNN thin films were deposited on Pt/Ti-coated stainless steel substrates of 30 μm by RF-magnetron sputtering. We measured output power by vibration applied to PEHs. The maximum output power of 63 nW was measured at a load resistance of 50 kΩ. We also measured output power by large bending deformation applied to card-type PEHs. During periodic bending motion, the maximum output power of 24 nW was measured from the effective area of 40 mm2 at a load resistance of 100 kΩ.
