圧電薄膜スピーカの設計、試作および評価に関する研究

抄録

In this study, piezoelectric thin-film earphone speakers were designed, fabricated, and evaluated. To enhance the acoustic output, the device design was optimized by finite element analysis. The two types of prototype speakers were fabricated using the piezoelectric PZT thin film deposited on a stainless-steel substrate on which polyethylene films were covered as a diaphragm membrane to improve the acoustic output. The vibration displacement and sound pressure of the speakers were measured. We confirmed that the sound output was improved by using polyethylene film as the vibrating film in both of the two shapes. The speaker with the taper cantilevers achieved a sound pressure level of 90 dB at 4 kHz in the rubber tube.