抄録
Many precise measurement devices or optical instruments are sensible to disturbances that are induced by environmental conditions. Therefore, such instruments have to be decoupled mechanically from the environment by means of vibration isolation. Because of the high requirements (high degree of isolation even at low frequencies), a sufficient vibration isolation can only be reached by using active elements. The process of realization of such an active vibration isolation system includes the choice respectively development of a suitable actuator, the modeling and verification of its dynamical behavior, the design of capable controller and finally the implementation of the vibration isolation system in the bearing system.
