抄録
Electrochemical machining has been increasingly recognized for the potential for micromachining. A process to erode a hole of hundreds of micronmeters on the metal surface is analyzed in the current paper. The precision of the machined geometry is a concern of the application of the micro-ECM. The purpose of this study is to predict the profile development of the machined surface under the applied tool electrode during the process. A theoretical and computational model is presented to illustrate how the machined profile evolves as the time elapses. The analysis is based on the fundamental law of electrolysis and the integral for a finite-width tool. The validity of the model is examined by experiments.
