抄録
An electrostatic drive micro cantilever, which is able to move quickly, is suitable for functional optical devices. However, the cantilever is pulled into the electrode over the specific deflection because the electrostatic force drastically increases and the system falls into unstable state. To avoid the pull-in effect and control the deflection and dynamics of the cantilever, we designed a deflection/deflection speed control system based on the liner quadratic optimal control technique.
