抄録
The present paper considers the thermal force in the thin film layer after expansion/contraction and to estimate the maximum thermal force in the layer. As an analytical model of the deposited layer, the layer are assumed to be a chain f circular particles and each particle is adhered to the neighboring ones with a flat wall. In order to estimate the thermal force in a single particle that has two flat wall boundaries, a linear thermo-elastic analysis for the particle is carried out. The standard thermo-elastic technique for the dual series is applied to the particle with mixed boundary conditions and then approximate expressions for the contact stress and the thermal expansion force are obtained.
