抄録
This research aimed to develop the super-low pressure controller which was able to give the test piece the stable super-low pressure to obtain the machined surface quality equal with the separation abrasive processing. Super-finishing process can make good finished surfaces in short time. In addition, super-finishing is widely used in the last finishing of slide planes of precision parts such as bearings. We processed super-finishing with this device to confirm the ability. As a result, the machined surface improved when pressure decreased. Moreover, when stone pressure was 0.2MPa, roughness of finished was 12.5nm that the working accuracy was the highest.
