関西支部講演会講演論文集
Online ISSN : 2424-2756
セッションID: 803
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803 成膜後基板焼入れ処理したTiN薄膜の摩擦摩耗特性(GS-3,4 表面・摩耗,研究発表講演)
田邉 裕貴三好 良夫高松 徹相良 秀一
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The ball-on-disc type wear test was carried out for TiN film which steel substrate was quenched after TiN coating, and the effects of the substrate post quenching on the wear properties of TiN film were discussed. TiN film on the substrate quenched after TiN coating revealed the lower friction coefficient and the higher wear resistance than the film coated on the quenched substrate. The low friction coefficient obtained by the substrate post quenching was attributed to the formation of the titanium oxide which acted as a lubricant. In addition, the flaking initiation life was also improved because of the high adhesive strength obtained by the substrate post quenching.
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© 2005 一般社団法人 日本機械学会
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