Evaluation of interfacial crack initiation strength from free-edge in micro-scale Si/Cu components―effect of hydrogen―

Abstract

The strength against fracture initiation from an interface free-edge of silicon (Si) and copper (Cu) micro-components is studied. By using three types of specimens having the same free-edge geometry (135°/135°) but different outer shape, quantitative fracture tests are conducted either in a vacuum environment or in a hydrogen (H₂) environment. It is found that the hydrogen-induced reduction of the fracture strength represented by the elastic stress intensity factor (SIF) of the near edge normal stress component is different depending on the specimen type.