抄録
A laser opto-microactuator has been proposed as an Optical Micro-Electro-Mechanical-Systems (OMEMS). The rotational or twisting mechanisms of the micro actuator have been discussed. In the present paper experimental and numerical approaches have been carried out. For increasing the absorption rates of a laser beam on the blades of the micro actuator, carbon molecules were deposited from a heated carbon fiber to substrates in a vacuum deposition machine. The deposition rates were experimentally measured and are compared with the numerical results by DSMC.
