Evaluation of mechanical properties of the thin film is very important to MEMS process, because it is well known that miniaturization of materials, such as nano particles, nano dots, etc., induces the characteristic physical and chemical properties, which are different from those of bulk materials. The mechanical properties of thin films were evaluated by laser-induced surface acoustic wave method (SAW method). We also used nanoindentation method in order to verify the validity of the results obtained by SAW method. The results indicate that SAW method is same level of accuracy of nanoindentation method.
