20514 多孔質真空チャックの把持特性に関する研究(トライボロジーと機械要素(2),OS.11 トライボロジーと機械要素)
詳細
In recent years, the Vacuum Chuck has been usually used due to holding manufactured products, carrying parts and so on. Of them, the Vacuum Chuck utilizing the porous material is characterized by holding objects of various sizes and not bending them. However, holding characteristics of the porous vacuum chuck has hardly been reported. In this paper, the holding characteristics of the porous vacuum chuck are investigated theoretically and experimentally.
