21509 原子間力顕微鏡を用いたナノ加工に関する研究(微細加工,OS.13 微細加工)

抄録

In order to obtain the basic data to clarify the material removal mechanism in the nano-grinding, fundamental experiments to generate the nanoscale grooves of Single-crystal Si has been tried using an Atomic Force Microscope combined with a two-axis capacitive force/displacement transducer. When increasing the normal force, three different regions in the normal force in which the different mechanism of groove formation take places are found. They are an elastic deformation region without remaining deformation, a plastic deformation region in which the groove is dominantly formed by plastic flow and a removal process region in which the groove is dominantly formed by removal process The minimum normal force f_<nR> at which the process begins is about 34.9μN and in this case the groove with a depth of about 0.42nm is formed. The critical normal force f_<nR> is identified from a characteristic change in a ratio of normal and tangential forces with increasing normal force.