21511 マイクロ研削における研削抵抗の測定法に関する研究(微細加工,OS.13 微細加工)

抄録

Micro fabrication is progressed in the mechanical processing makes the measurement of grinding forces is very difficult. The representative methods of measuring grinding forces synchronizing with the machining are piezo-electric type and the semiconductor strain gauge type dynamometer. However, the measurement of grinding forces becomes difficult because of the noise by the influence of grinding fluid in a traditional dynamometer. As the micro fabrication is expected to improve accuracy, the traditional method putting works on dynamometer is not always suitable for the practical use. We propose a new indirect measurement method by using the gap capacitance sensor which has high accuracy and can neglect the influence of the grinding fluid easily. In this report, the method of measuring the displacement, the relation between displacements and forces, and experimental results are reported.