日本機械学会関東支部総会講演会講演論文集
Online ISSN : 2424-2691
ISSN-L : 2424-2691
セッションID: 21115
会議情報
21115 絶縁基板上に塗布した銀ナノ粒子のレーザ焼結特性(配線技術,OS.3 機械工学が支援する微細加工技術(半導体,MEMS,NEMS))
外薗 貴之前川 克廣山崎 和彦御田 護
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会議録・要旨集 フリー

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抄録
When silver nanoparticles dispersed in organic solvents are metallized by laser irradiation, sintering characteristics have been investigated from the viewpoints of metallography, adhesion strength, and specific resistance. We found that these characteristics depend on laser wavelength to a great extent. An Ar+ laser (488 nm in wavelength) having a high absorption of light in the "Ag ink" promotes sintering from the ink surface, so that the solvents cannot evaporate freely during metallization, and consequently a coarse or porous Ag structure is formed. In contrast, a laser diode with a wavelength of 980 nm produces a denser Ag structure because of a poor absorption, which means that the laser beam is transmitted to the polyimide substrate and table, and then the ink is heated up from the bottom side by thermal conduction. While no peeling occurred at the sintered wire-substrate interface in the bend-peel test, a lower specific resistance of 4.8μΩ・cm was obtained.
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© 2009 一般社団法人 日本機械学会
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