117401 ウォータドライブステージの速度制御系の設計と評価(一般03 設計・生産加工学1)

抄録

We developed the water driven stage that uses the water hydrostatic bearings as well as the water piston-cylinder mechanism for driving the table. An important application of the stage is the precision machining of the various precise components, especially small parts in size, such as optical mirrors and lenses. Speed of linear motion of the stage can be controlled by the water flow rate supplied to the piston-cylinder. Therefore, it is needed to control the flow rate in order to maintain the desired feed motion of the stage during cutting operation. The present paper describes a design of the feedback control system of the water driven stage. Mathematical model of the stage and flow control valve are derived. Conventional feedback controller is then designed based on the derived mathematical model. As a result, the feedback control system of the second-order system is introduced. Feedback gains are determined so that desired response can be obtained. Performance of the designed control system is studied via step response.