抄録
In this study, we have developed on-chip AFM (atomic force microscope) using Three-Dimensional (3D) Microstages to improve the measurement techniques using an AFM. 3D Microstages are fabricated by MEMS (micro electro mechanicalsystem) technologies and generates continuous motions along three axes (x, y and z), which can substitute a PZT (lead zirconate titanate)tube scanner. In order to take advantage of the high measurement accuracy of 3D Microstages, we have developed Cantilever Integrated 3D Microstages. In addition, we improved 3D Microstages to facilitate manufacturing process and simulated the model using a finite element method. We have evaluated the performance of Cantilever Integrated 3D Microstages by measuring friction force image at several scanning rate.
