抄録
A water driven spindle was developed for a spindle of the ultra-precision machine tool. For the diamond turning applications, the precise rotation accuracy, high-bearing stiffness and thermal stability are required for the spindle of the ultra-precision machine tools. The water driven spindle equips water hydrostatic bearings and water driven system for spinning the rotor. The present paper investigates the rotational accuracy of the spindle, in particular for the axial runout that considerably affects machining results of the face cutting applications. The paper shows the axial motion of the spindle measured by a displacement sensor and an acceleration sensor. The paper also considers influence of the water pressure pulsation on the spindle motion. Furthermore, face cutting tests using a single point diamond cutting tool is carried out to consider the correlation between the spindle motions measured and machined surfaces.
