抄録
We demonstrates ZnO thin film deposition by using supercritical fluid chemical deposition and the application of the ZnO films in improving the adhesion of Cu/glass stacks. Zn-MOPD (Zn(C_9H_<15>O_3)_2) was used as a precursor, and the deposition was carried out at different O contents and temperatures. When O content was higher and/or deposition temperature was higher, white polycrystalline ZnO films were formed on a glass substrate. Brown ZnO films were deposited when O content was lower and/or deposition temperature was lower. XPS analyses indicates that the white ZnO films had less C contamination. A significant improvement in the adhesion of the Cu/glass stacks was observed when the fabricated ZnO film was inserted between Cu and glass.
