新規薄膜プロセッシングのメカニカルコーティング法とその展開

抄録

Mechanical coating technique (MCT) as a novel film formation process has been proposed and performed based on mechanical frictional wear and impacts among Al2O3 balls, columns, disks used as the substrates, and metal powder particles used as the coating metal in the bowl of planetary ball mill or pot mill. Also, MCT was developed to 2-step MCT, Bead mill mechanical coating technique (BMCT)，Wet mechanical coating technique (WMCT). In this work, BMCT and WMCT were performed to coat Ti films on Al2O3 balls as the substrates. The formation process of the Ti films was investigated and discussed. BMCT and WMCT are effective processes for coating metal films, and which are thinner than these by MCT. Mechanical frictional wear and impacts in BMCT and WMCT are different to these in MCT.