圧電アクチュエータを用いた半導体製造装置のための外付け型3自由度除振装置の開発

抄録

Since semiconductor manufacturing equipment does precise manufacture, the equipment can stop operation due to slight floor vibration. Accordingly, it is necessary to remove micro floor vibration in order to operate equipment properly. We have developed external vibration control device with piezoelectric actuator. By using this device, we demonstrated 78 % vibration elimination effect in horizontal 1 axis direction. However, control device which eliminates floor vibration of multiple direction is required in order to apply the device in factories. Therefore, the objective of this research is to develop the vibration control device which controls multiple degrees of freedom. In this paper, we firstly installed new piezoelectric actuator in a different direction, aiming to control 2 horizontal and 1 rotational axis. Then we demonstrated the device does not interfere with other axis during control. After that, we tested the control performance of 2DOF by horizontal 2 axis control. And lastly, we evaluated and improved 3DOF control performance by adding 1 rotational axis.