抄録
A new optical measuring method of edge profiles with a few nanometer resolution for micro cutting tool is proposed. The edge profiles are scaled by the measurable width between the first two maxima in diffraction patterns, which relate to the width of a slit-type aperture formed between a reference knife-edge and a tool cutting-edge. This technique is applicable for on-machine measurement due to simplicity and long working distance of the optical system. In this paper, first, the theoretical analysis reveals the measurement resolution. Next, the scalability and the practicability of the method are affirmed by the fundamental experiments. Furthermore, the experimental verifications are carried out for practical tools such as straight and helical flute cutting tools. Subsequently, good agreement of profiles measured by developed experimental apparatus with a scanning ion microscope image verifies that the proposed method is efficient to accurately measure cutting-edge profiles.
