抄録
The study deals with the improvement of performance of an ultraprecision machining center employing pneumatic bearings and sliders. From the viewpoint that the microvibration greatly affects the surface quality of workpieces, the suppression is tried on the basis of the laminarization of all piping and air bearing surfaces. The ultraprecision machining center is reconstructed to realize the laminarization by calculating the Reynolds number. Cutting experiments were conducted by use of the ultraprecision machining center. As a result, it is found that laminarization is very effective for improvement of surface quality in ultraprecision micromachining.
