抄録
Grinding method of correct plane shape and shallow pattern shape is investigated. Conventional surface grinder is used. The table that has permanent magnetic chuck on six piezo-electric actuators is used. Firstly two pairs of sensor and circular templates are used for compensating grinding in x and y feed direction. Ground surface by this method was compensated to the correct plane surface. For nearer compensating grinding performance, 3D contour template is used. Contour of any flexible shape is obtained with 9 adjustable screws. From the result the maximum error from correct plane is less than 0.4μm on the work of 100mm width and 130mm length. Then shallow square pads such as oil pad was able to be ground by using the contour template and usefulness of proposed method is examined.
