抄録
This paper describes a PZT-based fast-tool-servo (FTS) for ultra-precision diamond turning. A pre-loaded ring-type PZT with a maximum stroke of 70μm is employed to actuate the diamond tool attached on the free end of the PZT. The displacement of the PZT is servo controlled by a PID controller based on the measurement result of a capacitance-type displacement sensor integrated inside the PZT actuator. A piezoelectric-type force sensor is coaxially connected on the other end of the PZT for detection of machining force. Investigation of static and dynamic responses of the FTS, calibration of the force sensor output are carried out.
