抄録
In this paper a multi-function high precision tabletop CNC machine for making micro parts is developed. All the needed machining processes can be carried out on the same machine without unloading, reloading and readjusting the workpiece for subsequent processes. Currently the functions of micro high speed milling, micro-EDM, micro wire-EDM, and micro on-line measurement have been accomplished and tested. A dual-spindle is designed for micro CNC milling, microelectrode fabrication and micro-EDM. A novel mechanism that allows versatile cutting by a 20μm diameter wire is designed for micro wire-EDM. Various micro parts and high aspect ratio microstructure are successfully fabricated. Furthermore, based on the "short-circuit principle" an on-line micro part measuring system is developed and implemented.
