Development of Aspherical Gradient Index (GRIN) Lens Fabrication System based on VCAD Concept and ELID Grinding(Nanoprecision Elid-grinding (continued))

抄録

ELID (Electrolytic In-process Dressing) grinding method is possible to achieve ultraprecision smooth surface of hard and brittle materials. To obtain ultra smooth surface required such as micro lens and its metal mold, final polish process which required long time after conventional grinding process was necessary. ELID grinding method using an ultraprecision grinding machine tool will be very effective in reducing the time required for finial polishing process, In this paper, a fabrication experiment using this ELID grinding process was studied for Gradient Index (GRIN) lens. Especially, as a nano-precision micro-ELID grinding machining for GRIN lens, we studies on conditions of ELID grinding using a desk-top type 4 axes machine for development of GRIN aspherical lens with paraboloidal form, and GRIN prism.