抄録
High performance in-process status monitoring sensors are important devices to build an intelligent machine tool for ultraprecision machining. However, it is particularly difficult to monitor machining status during an ultraprecision machining because physical behaviors around the cutting point are extremely small to measure. We proposed a micro-sized thermometry-type in-process sensor which is mounted directly on the rake face of the tool tip nearby the cutting edge. The developed sensor could monitor changes of the cutting condition during a cutting process. Furthermore, the developed sensor could be applied for an adaptive control of ultraprecision machining. The results confirmed the sensor has a remarkable performance.