Abstract
Positioning table systems applied for the field of nanotechnology require achieving a nano-scale motion control, a high speed drive and a compact structure. In order to meet such requirements, it is necessary and indispensable to develop a new nano-positioning table system. In this study, therefore, a compact nanometer positioning table system with a squeeze bearing was newly developed. The developed table system was integrated with a linear motor and a squeeze bearing. In addition, the levitation characteristics of the bearing and the positioning performance were evaluated. Experimental results confirmed that the developed table system has remarkable performance.
