Vertical Nano-Positioning System with Gravity Compensator

Abstract

In recent years, requirements for nano-positioning have been increased in order to enhance ultraprecision machining capability. In particularly vertical nano-positioning has been required to meet suchdemand. This paper proposes a vertical nano-positioning system which has an innovative structure witha gravity compensator. The developed system consists of linear motor and aerostatic guideway, andtherefore, the moving stage is in perfectly noncontact condition. The moving stage is verticallysupported by the gravity compensator with a vacuum cylinder. In addition, performance evaluation ofthe developed system was carried out through a series of nano-positioning experiments. The evaluationresults confirmed that the developed system has a remarkable performance suitable for applicationsrequiring vertical nano-positioning control.