Grooving Performances of Developed Micro Diamond Grinding Tool by Electroless Composite Plating on Hard and Brittle Materials

Abstract

The grooving performances of fabricated micro diamond grinding tool with a diameter of 115 μm on hard and brittle materials were studied. Micro diamond with grit size of 2 to 4 μm was used to fabricate the grinding tool by electroless nickel-phosphorus (Ni-P) composite plating. Here, by using the fabricated tools we try to investigate the machinability in grooving of each workpiece; single crystalline silicon and quartz glass in the aspect of feed rate and grinding speed to the tool life.